Method and System for Analyzing Spatial Resolution of Microwave Near-field Probe and Microwave Microscope Equipped with the System

A method for analyzing a spatial resolution of a microwave near-field probe comprising:

• drawing a three-dimensional equipotential surface in a sample using an electric field formula calculated by a quasi-static theory;
• establishing an equivalent model of the sample using finite element analysis software, so as to change material characteristics in an area outside the three-dimensional equipotential surface;
• determining a near-field action range of the microwave near-field probe by observing an influence of changing materials on a potential distribution in the sample;
• and
• analyzing and calculating the spatial resolution of a microwave near-field scanning microscope.

A program storage medium for receiving user input, where a stored computer program enables an electronic device to:

• drawing a three-dimensional equipotential surface in a sample using an electric field formula calculated by a quasi-static theory;
• establishing an equivalent model of the sample using finite element analysis software, so as to change material characteristics in an area outside the three-dimensional equipotential surface;
• determining a near-field action range of a microwave near-field probe by observing an influence of changing materials on a potential distribution in the sample;
• and
• analyzing and calculating the spatial resolution of a microwave near-field scanning microscope.