Micro-Four-Point Metrology of Joule-Heating-Induced Modulation of Test Sample Properties

A method for determining the temperature coefficient of resistance, said method comprising:

• providing said test sample, said test sample being made of an electrically conducting or semiconducting material,
• providing a set of terminals including at least four terminals and at least four electrically conducting interconnections between said terminals and said electrically conducting or semiconducting material, said four electrically conducting interconnections contacting four positions at said electrically conducting or semiconducting material,
• providing a power source and an electric circuit for generating a current, injecting a first current into said test sample by means of a first combination of two terminals from said set of terminals,
• measuring a first voltage by means of a second combination of two terminals from said set of terminals,
• injecting a second current into said test sample by means of a third combination of two terminals from said set of terminals,
• measuring a second voltage by means of a fourth combination of two terminals from said set of terminals, and
• determining the temperature coefficient of resistance or a value proportional to the temperature coefficient of resistance as a function of said first current, said second current, said first voltage, and said second voltage.

A method for determining an electric property of a test sample, said method comprising:

• providing said test sample, said test sample being made of an electrically conducting or semiconducting material,
• providing at least two terminals and at least two electrically conducting interconnections between said two terminal and said electrically conducting or semiconducting material, said two electrically conducting interconnections contacting two positions at said electrically conducting or semiconducting material, providing a power source and an electric circuit for generating a current and injecting said current into said electrically conducting or semiconducting material by means of said terminals,
• measuring the voltage across a part of said electrically conducting or semiconducting material by means of said terminals, and
• determining an electric resistance of said electrically conducting or semiconducting material at a reference temperature as a function of said injected current, said measured voltage, and a value of a third harmonic frequency component of said measured voltage.