Measurement apparatus and measurement method
AssigneeSeiko Epson Corporation
InventorTomonori MATSUSHITA
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AssigneeSeiko Epson Corporation
InventorTomonori MATSUSHITA
Estimating the term…
A measurement apparatus includes a light source that emits light, a spectroscopic element that is configured to transmit light of a predetermined wavelength out of the light emitted from the light source portion, and capable of changing the predetermined wavelength of the light to be transmitted within a predetermined wavelength range, an interference optical system which separates light emitted from the spectroscopic element into measurement light irradiated on a measurement target and reference light reflected by a reference body, and generates interference light obtained by combining the measurement light reflected by the measurement target and the reference light reflected by the reference body, an image sensor that receives the interference light, and one or more processors configured to calculate a position of the measurement target based on spectrum information indicating a change in a received light quantity at the light receiving portion when the predetermined wavelength of the light transmitted through the spectroscopic element is changed.
A measurement apparatus comprising:
A measurement method in a measurement apparatus including
Dependencies are inferred from the claim text.