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US 2021/0332471 A1Published application
Evaporation Device
AssigneeWuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorChao XU
Life of this patent
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Abstract
An evaporation device includes a primary chamber and two or more secondary chambers at both sides of the primary chamber. The secondary chamber is configured to supply the disposition material in a disposition process. One or more of the secondary chambers serve as an alternative disposition source. When the disposition material in one or more of the secondary chambers is nearly empty, the alternative disposition source in the other secondary chamber starts to operate.
Claims18
A evaporation device, comprising:
- a primary chamber, comprising a first shell, a platform arranged in the first shell, and a line source crucible arranged opposite to the platform;
- two or more secondary chambers, comprising a disposition source;
- a switch, configured to control to turn on or off the secondary chamber or the disposition source;
- two or more first channels, the first channel comprising a first portion and a second portion;
- the first portion arranged in the primary chamber, the second portion arranged in the secondary chamber;
- the line source crucible connected to the disposition source through the first channel.
3 more elements
A evaporation device, comprising:
- a primary chamber, comprising a first shell, a platform arranged in the first shell, and a line source crucible arranged opposite to the platform;
- two or more secondary chambers, comprising a disposition source;
- a switch, configured to control to turn on or off the secondary chamber or the disposition source;
- two or more first channels, the first channel comprising a first portion and a second portion;
- the first portion arranged in the primary chamber, the second portion arranged in the secondary chamber;
- the line source crucible connected to the disposition source through the first channel;
- one or more first monitoring device arranged within the secondary chamber;
- the first monitoring device configured to monitor the remaining amount of evaporation material in the disposition source;
- one or more second monitoring device arranged within the primary chamber;
- the second monitoring device configured to monitor the evaporating rate of the evaporation material.
7 more elements
Dependencies are inferred from the claim text.