Back to results
US 2021/0332264 A1Published application
Novel polishing vehicles and compositions with tunable viscosity
AssigneeFujimi Incorporated
InventorsW. Scott Rader, Shawn R. Decker
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to aqueous polishing vehicles and polishing compositions, where the polishing compositions comprise suspended abrasive particles. More particularly, the polishing vehicles and polishing compositions have tunable viscosity, shear stability, and resistance to hard packing and thus can continuously suspend abrasive particles.
Claims18
A polishing composition comprising a first viscosity modifying agent, a second viscosity modifying agent, a pH adjusting agent, an abrasive, and water, wherein
- the first viscosity modifying agent comprises a cellulose derivative or a polysaccharide;
- the second viscosity modifying agent comprises an anionic polymer;
- the pH adjusting agent comprises an inorganic or amine base;
- and
- the abrasive has an average particle size of about 50 nm or more.
2 more elements
Dependencies are inferred from the claim text.