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US 2021/0331184 A1Published application
Nozzle for cleaning substrate and method of manufacturing the same
AssigneeHs Hi-Tech Co., Ltd.
InventorsBeom Jin KIM, Hyun Sin KIM
Life of this patent
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Abstract
The present invention relates to a nozzle for cleaning a substrate by discharging cleaning liquid to the substrate and a method of manufacturing the nozzle and, more particularly, to a nozzle for cleaning a substrate and a method of manufacturing the nozzle, the nozzle having pressure resistance performance capable of enduring high supply pressure of the cleaning liquid.
Claims13
A nozzle for cleaning a substrate, the nozzle comprising:
- an upper flow path part communicating with a main hole;
- and
- a lower flow path part connecting the upper flow path part to a discharging hole so as to allow the upper flow path part and the discharging hole to communicate with each other,
- wherein an upper surface of the upper flow path part and a lower surface of the lower flow path part are vertically spaced apart from each other.
1 more element
A method of manufacturing a nozzle for cleaning a substrate, the method comprising:
- providing a body, wherein a first body is provided such that a first upper flow path part and a second upper flow path part are formed on a lower surface of the first body and a first main hole communicating with the first upper flow path part and a second main hole communicating with the second upper flow path part are formed on an upper surface thereof, and a second body is provided such that a plurality of lower flow paths is formed separately on an upper surface thereof to be spaced apart from each other;
- and
- coupling the lower surface of the first body and the upper surface of the second body together, wherein the coupling is provided to connect an upper portion of a first side of each of the plurality of lower flow paths to a lower portion of an end of a first branched section of the first upper flow path part so as to allow the first side of each of the lower flow paths and the end of the first branched section communicate with each other, and to connect an upper portion of a second side of each of the plurality of lower flow paths to a lower portion of an end of a second branched section of the second upper flow path part so as to allow the second side of each of the lower flow paths and the end of the second branched section to communicate with each other.
Dependencies are inferred from the claim text.