US 2021/0292158 A1Published application

Microelectromechanical microphone with reduced overall size

AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives

InventorsSamer DAGHER, Loic JOET

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Abstract

A microelectromechanical microphone including a microphone unit made from a first substrate, the microphone unit including a movable element capable of being displaced under the effect of a pressure difference and a device for measuring the displacement of the movable element, a cover made from a second substrate, the cover having a first recess, first device for electrically connecting the measurement device to a control unit, the microphone unit and the cover delimiting between them a vacuum space housing the measurement device and a first cavity, from the first recess, partly closed by the movable element, the vacuum space and the first cavity being insulated in a sealed manner from each other, the microphone including a device for mechanically transmitting the displacement of the movable element to the measurement device and a sealed insulation element through which the transmission device passes.

Claims19

Dependent claims

A microelectromechanical microphone including comprising:

a microphone unit made from a first substrate, the microphone unit comprising a movable element capable of being displaced under the effect of a pressure difference and at least one sensor for measuring the displacement of the movable element,
a cover made from a second substrate, said cover having at least one first recess,
a first electrical connector for connecting the at least one sensor to a control unit,
the microphone unit and the cover being assembled so that they delimit between them a controlled atmosphere space, the controlled atmosphere being at a pressure lower than atmospheric pressure, housing the at least one sensor, and a first cavity from the first recess, the movable element partly closing said first cavity so that the first cavity is in fluid communication with the external environment, the controlled atmosphere space and the first cavity being insulated in a sealed manner from each other, said microphone also including at least one transmission member for mechanically transmitting the displacement of the movable element to the at least one sensor and an sealed insulation element through which the at least one transmission member pass and ensuring sealed passage of the at least one transmission member between the external environment and a measurement chamber while maintaining the sealed insulation, the controlled atmosphere space and the first cavity being on a same side of the plane of the sealed insulation element.

1 more element

A method for manufacturing at least one microphone comprising a movable element configured to displace under the effect of a pressure difference between the external environment and a first cavity, the movable element comprising a face directed to the external environment and a face directed to the first cavity, said first cavity being fluidly connected to the external environment, at least one sensor for measuring the displacement of the movable element, said at least one sensor being housed in a measurement chamber insulated in a sealed manner from the external environment, at least one transmission member for mechanically transmitting the displacement of the movable element to at least one sensor connecting the movable element and at least part of the at least one measurement sensor an sealed insulation element through which the at least one transmission member pass and ensuring sealed passage of the at least one transmission member between the external environment and the measurement chamber while maintaining the sealed insulation, said method including:

a) manufacturing a first subassembly comprising the movable part, part of the at least one transmission member, the sealed insulation element and at least part of the at least one sensor,
(b) manufacturing a second subassembly comprising at least the first cavity,
(c) manufacturing first electrical connector for connecting the at lease least one sensor to a control unit,
(d) assembling the first subassembly and the second subassembly so that they delimit a controlled atmosphere space at a pressure lower than the atmospheric pressure, so that the controlled atmosphere space and the first cavity are on a same side of the plane of the sealed insulation element and so that the first cavity faces the second face of the movable element and the first electrical connector is in electrical contact with the at least one sensor, and so as to form the measurement chamber insulated in a sealed manner from the external environment,
(e) structuring the first subassembly to form the other part of the at least one transmission member and releasing the movable element, the at least one transmission member and the at least one sensor,
f) connecting at least one sensor to a control unit.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application: 17/206,752Filed 19 Mar 2021
Priority: FR 20 0282623 Mar 2020
Published: 23 Sep 2021
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

B81B 7/02
Microstructural systems ; Auxiliary parts of microstructural devices or systems: containing distinct electrical or optical devices of particular…
H04R 19/005
Electrostatic transducers: using semiconductor materials
H04R 19/04
Electrostatic transducers: microphones
B81B 2201/0257
Sensors: microphones or microspeakers

Family

US 12,215,022 B2Related patent
US 2021/0292158 A1This patent

From the US filing history. Foreign family members aren’t listed.

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