Iron catalyzed hydrochlorination of silicon tetrachloride to trichlorosilane
AssigneeMitsubishi Polycrystalline Silicon America Corporation (MIPSA)
InventorsMatthias A. Colomb, Bryan H. Nettles
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AssigneeMitsubishi Polycrystalline Silicon America Corporation (MIPSA)
InventorsMatthias A. Colomb, Bryan H. Nettles
Estimating the term…
In the hydrochlorination reaction, silicon tetrachloride (STC), metallurgical silicon, and hydrogen are converted to trichlorosilane (TCS) at about 540° C. Previously, a pilot-scale reactor was used to study the yield of TCS produced by the hydrochlorination reaction. The yield observed by experimentation compared favorably with a scalable mathematical model developed to predict the rate of TCS conversion. The model predicted that 90% of the final amount of TCS produced was achieved after the reactant gas traveled a quarter of the vertical distance in the reaction section of the reactor. The pilot-scale reactor was shortened to verify the model predictions. In addition, some catalytic effects on the reaction were studied.
A reactor for producing trichlorosilane (TCS) from the hydrochlorination of silicon tetrachloride (STC) with hydrogen in the presence of metallurgical silicon (Me-Si) comprising:
A reactor for producing trichlorosilane (TCS) from the hydrochlorination of silicon tetrachloride (STC) with hydrogen in the presence of metallurgical silicon (Me-Si) comprising:
A method for producing trichlorosilane (TCS) from the hydrochlorination of silicon tetrachloride (STC) with hydrogen in the presence of metallurgical silicon (Me-Si) comprising:
Dependencies are inferred from the claim text.