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US 2021/0281240 A1Published application
High power acoustic resonators
AssigneeMurata Manufacturing Co., Ltd.
InventorsBryant Garcia, Robert Hammond, Patrick Turner, Neal Fenzi, Viktor Plesski, Ventsislav Yantchev
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Abstract
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a substrate and a piezoelectric diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) has interleaved fingers on the diaphragm. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the diaphragm and less than or equal to 2.5 times the thickness of the diaphragm.
Claims20
An acoustic resonator device comprising:
- a substrate;
- a piezoelectric diaphragm that spans a cavity in the substrate;
- and
- an interdigital transducer (IDT) having interleaved fingers on the diaphragm, wherein
- a thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the diaphragm and less than or equal to 2.5 times the thickness of the diaphragm.
2 more elements
An acoustic resonator device comprising:
- a piezoelectric diaphragm;
- and
- an interdigital transducer (IDT) having interleaved fingers on the diaphragm, wherein a thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the diaphragm and less than or equal to 2.5 times the thickness of the diaphragm.
Dependencies are inferred from the claim text.