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US 2021/0281237 A1Published application
Acoustic wave device and manufacturing method thereof
AssigneeEpistar Corporation
InventorsTA-CHENG HSU, WEI-SHOU CHEN, CHUNG-JEN CHUNG, CHIA-MIN CHANG
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Abstract
An acoustic wave device, includes piezoelectric layer having an upper piezoelectric surface and a lower piezoelectric surface; an upper electrode formed on the upper piezoelectric surface; a lower electrode; a support layer including a non-monocrystalline insulating material; and a lower cover, wherein the lower electrode and the support layer formed between the lower cover and the lower piezoelectric surface.
Claims20
An acoustic wave device, comprising:
- a piezoelectric layer, comprising an upper piezoelectric surface and a lower piezoelectric surface;
- an upper electrode formed on the upper piezoelectric surface;
- a lower electrode;
- a support layer, comprising a non-monocrystalline insulating material;
- and
- a lower cover, wherein the lower electrode and the support layer formed between the lower cover and the lower piezoelectric surface.
3 more elements
A manufacturing method of an acoustic wave device, comprising:
- providing a substrate;
- forming a piezoelectric layer on the substrate by epitaxial growth, wherein the piezoelectric layer comprises an upper piezoelectric surface and a lower piezoelectric surface;
- forming an upper electrode on the upper piezoelectric surface;
- forming an upper cover on the upper electrode;
- removing the substrate;
- forming a lower electrode on the lower piezoelectric surface;
- forming a support layer on the lower piezoelectric surface;
- and
- forming a lower cover on the lower electrode and the support layer.
6 more elements
Dependencies are inferred from the claim text.