Method of fabricating a light emitting device having a stacked structure

A computer-readable storage medium, storing:

• a computational program for calculating combination yields of first wafers, second wafers, and third wafers in a first group, on the basis of the data on whether predetermined measurement locations on each wafer in the first group of wafers including a group of first wafers, a group of second wafers, and a group of third wafers are defective or not, respectively,
• the computational program, upon execution by a processor, configured to perform operations, comprising:
• determining whether or not a measurement result of an emission wavelength for each predetermined measurement location of each wafer is in a preset range from a target wavelength;
• upon determination that the measurement result is outside of the preset range from the target wavelength, determining that a corresponding measurement location to the measurement result has a defect;
• calculating a combination yield of a test stacked structure based on a count of overlapping defective measurement locations in the test stacked structure, wherein the test stacked structure includes a first wafer, a second wafer, and a third wafer, selected from each group and combined in each different predetermined order;
• and
• determining a resultant combination of the first wafer, the second wafer and the third wafer by comparing each combination yield of each test stacked structure.