Thyristor, triac and transient-voltage-suppression diode manufacturing
AssigneeSTMicroelectronics (Tours) SAS
InventorsPatrick HAUTTECOEUR, Vincent CARO
Life of this patent
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Abstract
A device includes a semiconductor substrate. A step is formed at a periphery of the semiconductor substrate. A first layer, made of polysilicon doped in oxygen, is deposited on top of and in contact with a first surface of the substrate. This first layer extends at least on a wall and bottom of the step. A second layer, made of glass, is deposited on top of the first layer and the edges of the first layer. The second layer forms a boss between the step and a central area of the device.
Claims31
A device, comprising:
- a semiconductor substrate including a step at a periphery of the semiconductor substrate;
- a first layer on top of and in contact with a first surface of the semiconductor substrate and extending at least on and in contact with a wall and bottom of said step, wherein the first layer is made of polysilicon doped with oxygen;
- and
- a second layer extending on and in contact with the first layer and on edges of the first layer, said second layer forming a boss between the step and a central area of the device, wherein the second layer is made of glass.
An electronic component comprising the step, first layer and second layer on each surface of the semiconductor substrate to form circuit component selected from the group consisting of:
- a thyristor, a triac and a transient-voltage-suppression diode.
A method of manufacturing a device, comprising:
- forming a step at a periphery of a semiconductor substrate;
- forming a first layer on top of and in contact with a first surface of the semiconductor substrate, the first layer extending at least on and in contact with walls and bottoms of said step, wherein the first layer is made of polysilicon doped with oxygen;
- and
- forming a second layer extending on and in contact with the first layer and the edges of the first layer to form, between the step and a central portion of the device, a boss, wherein the second layer is made of glass.
Dependencies are inferred from the claim text.