Method for connecting cross-components at optimised density

A hybridisation electrical connection method of a first component to a second component, the first component including a first connection face and the second component including a second connection face, the first connection face including at least a first connection zone and a second connection zone to be connected respectively to at least a third connection zone and a fourth corresponding connection zone of the second connection face,

• the hybridisation electrical connection method including the following steps:
• formation of a first metallic ductile material bump and a second metallic ductile material bump in respective contact with the first connection zone and the second connection zone,
• formation of a first insert and a second insert made of conductive material in contact with respectively the third connection zone and the fourth connection zone, the first insert and the second insert being intended to be inserted into respectively the first ductile material bump and the second ductile material bump, the first insert and the second insert being presented in a hollow shape,
• wherein, during the formation step of the first insert and of the second insert there is also formed on the second connection face at least a first hybridisation barrier and a second hybridisation barrier arranged at least in part between the first insert and the second insert and electrically insulated from one another, said first hybridisation barrier and second hybridisation barrier being both positioned outside the surfaces projected orthogonally onto the second connection face of the first ductile material bumps and second ductile material bumps when the first connection zone and the second connection zone are placed facing respectively the third connection zone and fourth connection zone, the first hybridisation barrier and the second hybridisation barrier being outside respectively the fourth connection zone and the third connection zone, the first hybridisation barrier and the second hybridisation barrier surrounding respectively the first insert and the second insert,
• the method hybridisation electrical connection further including the following step:
• connection of the first connection zone and the second connection zone with respectively the third connection zone and the fourth connection zone by inserting the first insert and the second insert into respectively the first ductile material bump and the second ductile material bump, the first connection zone and second connection zone facing the third connection zone and fourth connection zone and the first hybridisation barrier and second hybridisation barrier acting as a barrier by containing the deformation of respectively the first ductile material bump and the second ductile material bump in the direction of respectively the fourth connection zone and the third connection zone,
• and wherein the step of forming the first insert and the second insert includes the following substeps:
• deposition of a sacrificial layer on the second connection face,
• partial etching, of the sacrificial layer so as to release a part of each of the third connection zone and of the fourth connection zone corresponding to a zone portion intended to be present between the insert and the corresponding hybridisation barrier,
• deposition of a layer of a metallic material intended to form the first insert, the second insert, the first hybridisation barrier and the second hybridisation barrier,
• polishing of the second connection face so as to remove the part of the layer of metallic material which is in contact with the surface of the sacrificial layer of each of the third connection zone and of the fourth connection zone which is opposite the second connection face, and retain the parts of the layer of metallic material covering the parts of each of the third connection zone and of the fourth connection zone previously released, said retained parts of the layer of metallic material thus forming a first conductive element and a second conductive element of respectively the first connection zone and the second connection zone, the first conductive element forming the first insert and the first hybridisation barrier, the second conductive element forming the second insert and the second hybridisation barrier
• removal of the sacrificial layer.

An assembly of a first component and a second component interconnected by hybridisation,

• wherein the first component includes a first connection face comprising at least a first connection zone and a second connection zone, said first component further including a first ductile material bump and a second ductile material bump in contact respectively with the first connection zone and the second connection zone,
• wherein the second component includes a second connection face including at least a third connection zone and a fourth connection zone facing respectively the first connection zone and the second connection zone, the second component further including a first insert and a second insert in contact with respectively the third connection zone and the fourth connection zone, the first insert and second insert being respectively inserted in the first ductile material bump and the second ductile material bump so as to ensure an electrical connection of the first connection zone and the second connection zone to respectively the third connection zone and the fourth connection zone, the first insert and the second insert being presented in a hollow shape,
• wherein the second component further includes on the second connection face thereof a first hybridisation barriers and second hybridisation barriers) arranged at least in part between the first insert and the second insert, the first hybridisation barrier and the second hybridisation barrier being outside respectively the fourth connection zone and the third connection zone and acting as a barrier to respectively the first ductile material bump and the second ductile material bump in the direction of respectively the fourth connection zone and the third connection zone, the first hybridisation barrier and the second hybridisation barrier surrounding respectively the first insert and the second insert, the first insert and the first hybridisation barrier being connected by a first metallic base formed solely therebetween, the second insert and the second hybridisation barrier being connected by a second metallic base formed solely therebetween,
• wherein the first insert and the first hybridisation barrier are provided by a first conductive element in contact with the first connection zone, the second insert and the second barrier being provided by a second conductive element in contact with the second connection zone.