Semiconductor memory device and method for manufacturing same
AssigneeToshiba Memory Corporation
InventorsJun Fujiki, Shinya Arai, Kotaro Fujii
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AssigneeToshiba Memory Corporation
InventorsJun Fujiki, Shinya Arai, Kotaro Fujii
Estimating the term…
A semiconductor memory device includes a semiconductor substrate including a diode formed in an upper layer portion of the semiconductor substrate, a first insulating film provided above the semiconductor substrate, a first conductive film provided above the first insulating film and coupled to the diode, a stacked body provided above the first conductive film, an insulator and an electrode film being stacked alternately in the stacked body, a semiconductor member piercing the stacked body and being connected to the first conductive film, and a charge storage member provided between the electrode film and the semiconductor member.
A semiconductor memory device, comprising:
Dependencies are inferred from the claim text.