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US 2021/0280533 A1Published application
Crack suppression structure for hv isolation component
OwnerElizabeth Costner Stewart, Jeffrey A. Westinventors
Life of this patent
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Abstract
An integrated circuit (IC) includes a substrate having functional circuitry for realizing at least one circuit function configured together with at least one high voltage isolation component including a top metal feature above the substrate. A crack suppressing dielectric structure including at least a crack resistant dielectric layer is on at least a top of the top metal feature. At least one dielectric passivation overcoat (PO) layer is on an outer portion of the top metal feature.
Claims20
An integrated circuit (IC), comprising:
- a substrate having functional circuitry for realizing at least one circuit function with at least one high voltage isolation component including a top metal feature above the substrate;
- a crack suppressing dielectric structure comprising at least a dielectric layer on a top surface of the top metal feature, and a dielectric passivation overcoat (PO) layer that touches a top surface of the crack suppressing dielectric structure and a side surface of the top metal feature.
An integrated circuit (IC), comprising:
- a substrate having functional circuitry for realizing at least one circuit function with at least one high voltage isolation component including a top metal feature above the substrate;
- a first metal interconnect level, at least one second metal interconnect level over the first metal interconnect level, and a third metal interconnect level over the at least one second metal interconnect level, the third metal interconnect level including the top metal feature;
- a crack suppressing dielectric structure comprising at least one crack resistant dielectric layer on the top metal feature;
- a dielectric passivation overcoat (PO) layer over the top metal feature.
1 more element
An integrated circuit (IC), comprising:
- a lower metal interconnect level over a substrate, the lower metal interconnect level including a bottom capacitor plate of a capacitor;
- two or more intermediate metal interconnect levels over the lower metal interconnect level;
- a metal interconnect layer of a top metal interconnect level over the two or more intermediate metal interconnect levels;
- a top capacitor plate of the capacitor located in the metal interconnect layer;
- a crack suppressing dielectric structure on the metal interconnect layer, the crack suppressing dielectric structure comprising at least one dielectric layer of silicon nitride (SiN) or silicon carbide (SiC);
- and
- a dielectric passivation overcoat (PO) layer on the crack suppressing dielectric structure that touches both the PO layer and the top capacitor plate.
4 more elements
Dependencies are inferred from the claim text.