Alignment fixture for a reactor system
AssigneeASM IP Holding B.V.
InventorsSurojit Ganguli, Todd Robert Dunn, Ankit Kimtee
Life of this patent
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Abstract
An alignment fixture for a reactor system may comprise a fixture body comprising an inner perimeter at least partially defining a shape which comprises an inner space of the fixture body, wherein the inner space is configured to receive a susceptor of a reactor system; and/or a measuring protrusion coupled to the fixture body at a first position and protruding from the fixture body toward the inner space. The measuring protrusion may comprise an indicator between the fixture body and a measuring protrusion end of the measuring protrusion.
Claims20
A reactor system, comprising:
- a susceptor comprising a susceptor outer edge, wherein the susceptor is configured to receive a substrate thereon;
- a spacer plate comprising a plate interior space defined by a spacer plate inner wall, wherein the susceptor is disposed at least partially in the plate interior space,
- wherein the susceptor and spacer plate are disposed relative to one another such that there is a gap between the susceptor outer edge and the spacer plate inner wall;
- and
- an alignment fixture disposed at least partially within the gap between the susceptor outer edge and the spacer plate inner wall, wherein the alignment fixture comprises:
- a fixture body comprising an inner perimeter at least partially defining a shape which comprises an inner space of the fixture body, wherein the susceptor is disposed at least partially within the inner space;
- and
- a measuring protrusion protruding from the fixture body at a first position toward the inner space, wherein the measuring protrusion comprises an indicator between the fixture body and a measuring protrusion end of the measuring protrusion.
An alignment fixture, comprising:
- a fixture body comprising an inner perimeter at least partially defining a shape which comprises an inner space of the fixture body, wherein the inner space is configured to receive a susceptor of a reactor system;
- and
- a measuring protrusion coupled to the fixture body at a first position and protruding from the fixture body toward the inner space, wherein the measuring protrusion comprises an indicator between the fixture body and a measuring protrusion end of the measuring protrusion.
A method, comprising:
- disposing an alignment fixture at least partially within an area between a susceptor outer edge of a susceptor and a spacer plate inner wall of a spacer plate of a reactor system, wherein the susceptor is disposed within an inner space of the alignment fixture at least partially defined by an inner perimeter of the alignment fixture, wherein a measuring protrusion protruding from a fixture body of the alignment fixture is disposed over the outer edge of the susceptor;
- adjusting a position of the susceptor such that the susceptor is disposed in a desired position relative to the inner perimeter of the alignment fixture.
Dependencies are inferred from the claim text.