Manifold for a substrate container
AssigneeEntegris, Inc.
InventorsMatthew FULLER, Colton J. HARR, Ian DUTRO
Life of this patent
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AssigneeEntegris, Inc.
InventorsMatthew FULLER, Colton J. HARR, Ian DUTRO
Estimating the term…
A substrate container includes a shell defining an interior space and a manifold with an inlet and a gas distributing surface. The shell includes a front opening, a bottom wall, and a rear wall. The manifold is attached to the bottom wall and is closer to the front opening than the rear wall. The gas distributing surface is configured to distribute purge gas into the interior space. A method of purging an open substrate container includes supplying a first stream of purge gas to a manifold and supplying a second stream of purge gas to an interior space of the substrate container. The method also including the manifold distributing the purge gas of the first stream within the interior space of the substrate container.
A substrate container, comprising:
A substrate container, comprising:
A method of purging a substrate container when having a front opening that is open, comprising:
Dependencies are inferred from the claim text.