Substrate processing apparatus and substrate processing method

A substrate processing apparatus for processing substrates, the substrate processing apparatus comprising:

• a plurality of processing modules configured to perform predetermined processes on the substrates;
• a plurality of transport modules configured to transport the substrates;
• and
• an information display configured to display information about an error that occurred in the predetermined processes or while transporting the substrates,
• wherein the information display is configured to display, in a same screen:
• a substrate on which a predetermined process in which the error occurred was being performed,
• a processing module which was performing the predetermined process in which the error occurred, or a transport module which was transporting the substrate on which the predetermined process in which the error occurred was being performed,
• a timing at which the error occurred, and
• a cause of the error.

A substrate processing method for processing substrates, the substrate processing method comprising:

• performing predetermined processes on the substrates in a plurality of processing modules;
• and
• displaying information about an error that occurred in the predetermined processes on an information display,
• wherein the information display configured to display items in a same screen, the items comprising:
• a substrate on which a predetermined process in which the error occurred was being performed,
• a processing module which was performing the predetermined process in which the error occurred,
• a timing at which the error occurred, and
• a cause of the error.