Substrate transfer system and load lock module

A substrate transfer system comprising:

• an atmospheric substrate transfer module;
• a vacuum substrate transfer module;
• and
• a load lock module disposed on a side surface of the atmospheric substrate transfer module and disposed on an upper surface or a lower surface of the vacuum substrate transfer module,
• wherein the load lock module includes:
• a container having a first substrate transfer opening and a second substrate transfer opening, the first substrate transfer opening being formed in a side surface of the container to communicate an interior of the container with the atmospheric substrate transfer module, and the second substrate transfer opening being formed in a lower surface or an upper surface of the container to communicate the interior of the container with the vacuum substrate transfer module;
• a first gate configured to open or close the first substrate transfer opening;
• a second gate configured to open or close the second substrate transfer opening;
• and
• a substrate actuator configured to vertically move a substrate through the second substrate transfer opening between a first position in the container and a second position in the vacuum substrate transfer module, the first position being located at the same height as the first substrate transfer opening.