Etching tool for demountably etching multiple pieces of silicon carbide
AssigneeHunan San'an Semiconductor Co., Ltd.
InventorsSHAOZHONG CAI, JIE ZHANG, HUANGSHAN ZHANG, YIHONG LIN, SINA LI
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AssigneeHunan San'an Semiconductor Co., Ltd.
InventorsSHAOZHONG CAI, JIE ZHANG, HUANGSHAN ZHANG, YIHONG LIN, SINA LI
Estimating the term…
A detachable etching tool for etching a plurality of silicon carbide pieces has a first supporting column and a second supporting column, both of which are fixed through a tool fixing block. A bracket is arranged on the tool fixing block, and a limiting rod is installed on the lower end surface of the bracket. The bracket is inserted into the tool fixing block through the limiting rod and fixed on the tool fixing block with a fastening mechanism that comprises a base, a fixing seat, a telescopic spring, a telescopic guide column, a sliding block, a guide block, an inserting rod and a push-pull mechanism. The etching tool addresses low productivity per unit time and long time consumption in the etching processing.
A detachable etching tool for etching a plurality of silicon carbide pieces, comprising:
Dependencies are inferred from the claim text.