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US 2021/0280393 A1Published application
Method for conditioning a ceramic coating
AssigneeLam Research Corporation
InventorsHong SHIH, Xiaomin BIN, Duane OUTKA, Eric A. PAPE, Gregory A. PILGRIM, Girish M. HUNDI, Cliff LA CROIX
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Abstract
A method for conditioning ceramic coating on a part for use in a plasma processing chamber is provided. The ceramic coating is wetted with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution. The ceramic coating is blasted with particles. The ceramic coating is rinsed.
Claims16
A method for conditioning ceramic coating on a part for use in a plasma processing chamber, comprising:
- wetting the ceramic coating with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution;
- blasting the ceramic coating with particles;
- and
- rinsing the ceramic coating.
1 more element
Dependencies are inferred from the claim text.