A MEMS Display Device With Auto-Inspection Mechanism

A Micro-Electro-Mechanical Systems (MEMS) device, comprising:

• a substrate;
• a plurality of electronic circuits mounted on the substrate;
• a plurality of movable elements mounted on the substrate and arranged in an array, each of whose movement is controlled by application of an operating voltage by a respective electronic circuit of the plurality of electronic circuits;
• a plurality of stoppers mounted on the substrate, each stopper of the plurality of stoppers associated with a respective movable element to stop the movement of the movable element through mechanical contact of the stopper with the movable element;
• and
• an auto-inspection mechanism, mounted at least in part on the substrate, that applies a test voltage between at least one of the plurality of movable elements and an associated stopper and determines whether or not a leak current is present.