Film forming material for lithography, composition for film formation for lithography, underlayer film for lithography, and method for forming pattern
AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsMasayoshi UENO, Kouichi YAMADA, Akifumi CHIBA, Ken SUGITO, Junya HORIUCHI, Takashi MAKINOSHIMA, Masatoshi ECHIGO
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