Photodetector for scanning probe microscope

An AFM-NSOM dual-mode detector device comprising:

• an integral semiconductor structure configured to define a cantilever and tip assembly comprising at least one tip configured and operable as an AFM probe for monitoring topography properties of a surface being scanned by the tip, wherein an apex portion of said at least one tip is configured as an apertured photodetector having a metal-oxide-semiconductor layered structure formed with an aperture of a subwavelength dimensions adapted to collect evanescent waves created at a surface region in response to external illumination and directly convert collected evanescent waves into electric signals being read by an electrical circuit within the apex portion of the tip, said apex region of the tip being thereby configured and operable as an NSOM probe, while maintaining the cantilever and tip assembly operation as the AFM probe.

A surface probing system comprising:

• a light source unit configured and operable to produce pulsed illumination on a surface being scanned,
• a detector device comprising an integral semiconductor structure configured to define a cantilever and tip probe assembly, comprising at least one tip formed on the cantilever, wherein an apex portion of said at least one tip is configured as an apertured photodetector comprising a metal-oxide-semiconductor layered structure formed with an aperture of subwavelength dimensions allowing collection of evanescent waves created at a surface region in response to the pulsed illumination and direct conversion of the collected evanescent waves into electric signals being read by an electrical circuit within said apex portion of the tip, said integral semiconductor structure being thereby configured and operable for concurrently monitoring topographic and optical properties of the surface being scanned by said apex portion of the tip.