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US 2021/0278280 A1Published application
Deposition apparatus and method for inspecting nozzle using the same
AssigneeSamsung Display Co., Ltd.
InventorsSu Hwan LEE, Young Bae KEE, Min Woo KIM, Un Cheol SUNG, Byoung Gu AN, Jae Soo HA
Life of this patent
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Abstract
A method for inspecting a nozzle includes: measuring a temperature of the nozzle; comparing the temperature of the nozzle with a reference temperature; and determining whether or not the nozzle is clogged based on the temperature of the nozzle.
Claims20
A method for inspecting a nozzle, comprising:
- measuring a temperature of the nozzle;
- comparing the temperature of the nozzle with a reference temperature;
- and
- determining whether or not the nozzle is clogged based on the temperature of the nozzle.
1 more element
A method for inspecting a nozzle, comprising:
- photographing a nozzle by a thermal imaging camera to generate thermal image data including temperature information of the nozzle;
- and
- determining whether or not the nozzle is clogged based on the thermal image data.
A deposition apparatus, comprising:
- a deposition source including at least one nozzle arranged along a direction;
- a temperature measurement unit configured to measure a temperature of the nozzle;
- and
- a determination unit configured to determine whether or not the nozzle is clogged based on measurement data of the temperature measurement unit.
1 more element
Dependencies are inferred from the claim text.