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US 2021/0277514 A1Published application
Substrate guide and carrier
AssigneeUlvac, Inc.
InventorsToshinori KANEKO, Tetsuhiro OHNO
Life of this patent
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AssigneeUlvac, Inc.
InventorsToshinori KANEKO, Tetsuhiro OHNO
Estimating the term…
A substrate guide of the present invention is provided on a carrier frame of a carrier which holds a substrate substantially vertically so that a surface of the substrate is in a substantially vertical direction and supports the substrate by being in contact with at least a peripheral edge end surface portion of the substrate. The substrate guide includes a base attached to the carrier frame, a substrate support which comes into contact with the peripheral edge end surface portion of the substrate held by the carrier and is attached to the base to be movable in a normal direction of the peripheral edge end surface portion in a direction parallel to the surface of the substrate, and a force-applying member which applies a force to the substrate support toward the substrate with respect to the base.
A substrate guide provided on a carrier frame of a carrier which holds a substrate substantially vertically so that a surface of the substrate is in a substantially vertical direction, the substrate guide supporting the substrate by being in contact with at least a peripheral edge end surface portion of the substrate, the substrate guide comprising:
Dependencies are inferred from the claim text.