Method of Preparing ITO Ceramic Target With Controllable Grain Size

A method of preparing an ITO ceramic target with a controllable grain size, comprising:

• ball-milling and mixing In2O3 powder with mass fraction of 90˜97 and SnO2 powder with mass fraction of 10˜3, with deionized water, diluent, binder and polymer material, by a sand mill to obtain an ITO ceramic slurry with a solid content between 70˜80% and a viscosity between 120˜300 mpa·s, with an average particle size D50 of the mixed powder in the ITO ceramic slurry controlled at 200·300 nm;
• shaping the ITO ceramic slurry by a pressure grouting to obtain an ITO ceramic green body with a relative density of 58˜62%;
• the ITO ceramic green body undergoing an integrated degreasing and sintering treatment to obtain the ITO ceramic target;
• wherein, the integrated degreasing and sintering treatment includes:
• putting the ITO ceramic green body into a degreasing and sintering integrated furnace;
• heating the degreasing and sintering integrated furnace to a degreasing temperature of 700˜800° C., degreasing the ITO ceramic target in an atmospheric oxygen atmosphere for a degreasing time set to 12 to 36 hours;
• increasing the degreasing and sintering integrated furnace from the degreasing temperature to a first sintering temperature of 1,600˜1,650° C.;
• and
• after increasing to the first sintering temperature, keeping temperature at the first sintering temperature for 0˜60 min, then starting to reduce the degreasing and sintering integrated furnace from the first sintering temperature to a second sintering temperature of 1,500˜1,540° C., and sintering the ITO target at the second sintering temperature in the atmospheric oxygen atmosphere, with temperature kept for 12 to 36 hours, to finally obtain the ITO ceramic target.