Polishing composition
AssigneeSumitomo Seika Chemicals Co., Ltd.
InventorsTsuyoshi MASUDA, Hideaki NISHIGUCHI
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Abstract
Provided is a polishing means that can improve the flatness of a substrate without significantly reducing the polishing speed. More specifically, provided is a polishing composition comprising inorganic particles, water, and a water-soluble polymer, wherein (i) a 1 mass (wt/wt) % aqueous solution of the water-soluble polymer has a normal stress (N) of 1 or more at a shear rate of 10000 (1/S), or (ii) a 0.25 mass (wt/wt) % aqueous solution of the water-soluble polymer has a normal stress (N) of 1 or more at a shear rate of 10000 (1/S).
Claims4
A polishing composition comprising inorganic particles, water, and a water-soluble polymer,
- wherein a 1 mass (wt/wt) % aqueous solution of the water-soluble polymer has a normal stress (N) of 1 or more at a shear rate of 10000 (1/S).
A polishing composition comprising inorganic particles, water, and a water-soluble polymer,
- wherein a 0.25 mass (wt/wt) % aqueous solution of the water-soluble polymer has a normal stress (N) of 1 or more at a shear rate of 10000 (1/S).
Dependencies are inferred from the claim text.