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US 2021/0277017 A1Published application
Thioxanthone Derivatives, Composition Comprising the Same and Pattern Forming Method Comprising Said Composition
AssigneesLintfield Limited, Tokyo Electron Limited
InventorsChristopher Wall, Seiji NAGAHARA
Life of this patent
Estimating the term…
Abstract
Latent photoinitiator compounds are described, as well as compositions containing such compounds and their uses in photoinitiated methods for producing photoresist structures.
Claims21
A compound of the formula I:
- wherein n=1, 2, 3, 4 or 5;
- or
- a compound of the formula (Ia);
- wherein one or both of the aromatic rings in the compound of formula I or the compound of formula Ia is substituted with at least one substituent independently selected from hydroxy, alkoxy, benzyloxy, alkylcarbonate, hydroxyalkyl, acetal, ester, oxyacetic acid and esters thereof, aryloxy or arylthio.
1 more element
(canceled)
A compound which is selected from:
- 2,3-dimethoxy-9H-thioxanthen-9-one, 2,3-dihydroxy-9H-thioxanthen-9-one, 2,3,5-trimethoxy-9H-thioxanthen-9-one, 2,3,7-trimethoxy-9H-thioxanthen-9-one, 1,5,6-trihydroxy-9H-thioxanthen-9-one, 1,5,6-trimethoxy-9H-thioxanthen-9-one, 3,4-dihydroxy-9H-thioxanthen-9-one, 3,4-dimethoxy-9H-thioxanthen-9-one, 3′,4′-dimethoxyspiro[1,3-dioxane-2,9′-thioxanthene], 3′,4′-dimethoxyspiro[1,3-dioxolane-2,9′-thioxanthene], 2′,3′-dimethoxyspiro[(1.3)-dioxolane-2,9′-thioxanthene], 3,4-bis(benzyloxy)-9H-thioxanthen-9-one, 3,4-bis(1-ethoxyethyl)-9H-thioxanthen-9-one, di-t-butyl (9-thioxo-9H-thioxanthene-3,4-diyl)dicarbonate, methane;2′-methoxy-5,6-dimethyl-spiro[1,3-dioxepane-2,6′-thiochromeno[3,2-g][1,3]benzodioxole], 2-methoxythiochromeno[3,2-g][1,3]benzodioxol-6-one, 2′-methoxyspiro[1,3-dioxane-2,6′-thiochromeno[3,2-g][1,3]benzodioxole], 2′-methoxyspiro[1,3-dioxepane-2,6′-thiochromeno[2,3-g][1,3]benzodioxole], 2′-methoxy-5,5-dimethyl-spiro[1,3-dioxane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-methoxy-4,6-dimethyl-spiro[1,3-dioxane-2,6′-thiochromeno[3,2-g][1,3]benzodioxole], 2′-methoxy-4,7-dimethyl-spiro[1,3-dioxepane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-methoxy-5,5-dimethyl-spiro[1,3-dioxepane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-methoxy-5-methyl-spiro[1,3-dioxepane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-ethoxyspiro[1,3-dioxepane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-propoxyspiro[1,3-dioxepane-2,6′-thiochromeno[3,2-g][1,3]benzodioxole], 2′-phenoxyspiro[1,3-dioxepane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-isopropoxyspiro[1,3-dioxepane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-ethoxyspiro[1,3-dioxane-2,6′-thiochromeno[3,2-g][1,3]benzodioxole], 2′-ethoxyspiro[1,3-dioxolane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-propoxyspiro[1,3-dioxane-2,6′-thiochromeno[3,2-g][1,3]benzodioxole], 2′-propoxyspiro[1,3-dioxolane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-isopropoxyspiro[1,3-dioxane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-isopropoxyspiro[1,3-dioxolane-2,6′-thiochromeno[3,2-g][1,3]benzodioxole], 2′-methoxyspiro[1,3-dioxane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], 2′-methoxyspiro[1,3-dioxolane-2,6′-thiochromeno[2,3-e][1,3]benzodioxole], spiro[1,3-dioxolane-2,9′-thioxanthene]-3′,4′-diol, spiro[1,3-dioxane-2,9′-thioxanthene]-3′,4′-diol, spiro[1,3-dioxepane-2,9′-thioxanthene]-3′,4′-diol, 5-methylspiro[1,3-dioxepane-2,9′-thioxanthene]-3′,4′-diol, 5,5-dimethylspiro[1,3-dioxepane-2,9′-thioxanthene]-3′,4′-diol, 2-ethoxythiochromeno[2,3-e][1,3]benzodioxol-6-one, 3′,4′-dimethoxy-4,6-dimethyl-spiro[1,3-dioxane-2,9′-thioxanthene], 3′,4′-dimethoxy-4,5-dimethyl-spiro[1,3-dioxolane-2,9′-thioxanthene], 9,9-diethoxy-3,-dimethoxy-thioxanthene, 2-methoxy-6,6-dipropoxy-thiochromeno[3,2-g][1,3]benzodioxole or 6,6-diethoxy-2-methoxy-thiochromeno[2,3-e][1,3]benzodioxole.
-35. (canceled)
Dependencies are inferred from the claim text.