Maintenance methods for polishing systems and articles related thereto

A method of forming a hydrophobic coating on a surface of a polishing system component, comprising:

• cleaning the surface of the polishing system component to remove a polishing fluid residue therefrom;
• and
• applying a hydrophobicity causing chemical solution to the surface of the polishing system component, wherein the polishing system component is disposed within a substrate processing environment of polishing system, and wherein the hydrophobicity causing solution is applied to the surface of the polishing system component without removing the polishing system component from the substrate processing environment.

A hydrophobicity applicator, comprising:

• an applicator article formed of an open-celled foam material which has a porosity of about 60% or more;
• and
• a hydrophobicity causing chemical solution, wherein the applicator and the hydrophobicity causing chemical solution are packaged in a sealed container.