Substrate treatment device
AssigneeShibaura Mechatronics Corporation
InventorsMinami NAKAMURA, Daisuke MATSUSHIMA, Kensuke DEMURA
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AssigneeShibaura Mechatronics Corporation
InventorsMinami NAKAMURA, Daisuke MATSUSHIMA, Kensuke DEMURA
Estimating the term…
According to one embodiment, a substrate treatment device includes a placement stand configured to rotate a substrate, a cooling part configured to supply a cooling gas into a space between the placement stand and the substrate, a liquid supplier configured to supply a liquid on a surface of the substrate opposite to the placement stand side, a detector configured to detect a state of the liquid on the surface of the substrate, and a controller controlling at least one of a rotation speed of the substrate, a flow rate of the cooling gas, or a supply amount of the liquid. The controller sets the liquid on the surface of the substrate to be in a supercooled state, obtains a temperature of the liquid in the supercooled state at a start of freezing, and is configured to calculate a removal ratio of a contamination.
A substrate treatment device, comprising:
A substrate treatment device;
Dependencies are inferred from the claim text.