Microfluidic chip, head, and dispensing device for dispensing fluids containing an acidic component
AssigneeFunai Electric Co., Ltd.
InventorsDavid L. Bernard, Sean T. Weaver
Life of this patent
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Abstract
A microfluidic ejection chip includes a silicon substrate having a fluid passageway. The fluid passageway is defined by a silicon sidewall of the silicon substrate that is covered by a permanent passivation layer to protect the silicon sidewall from exposure to an acidic fluid. The permanent passivation layer is retained on the silicon sidewall at a conclusion of etching of the silicon substrate to form the fluid passageway.
Claims26
A microfluidic ejection chip, comprising a silicon substrate having a fluid passageway, the fluid passageway being defined by a silicon sidewall of the silicon substrate that is covered by a permanent passivation layer to protect the silicon sidewall from exposure to an acidic fluid, wherein the permanent passivation layer is retained on the silicon sidewall at a conclusion of etching of the silicon substrate to form the fluid passageway.
A microfluidic ejection head, comprising:
- a nozzle plate;
- and
- a microfluidic ejection chip connected to the nozzle plate, wherein the microfluidic ejection chip includes a silicon substrate having a fluid passageway, the fluid passageway being defined by a silicon sidewall of the silicon substrate that is covered by a permanent passivation layer to protect the silicon sidewall from exposure to an acidic fluid.
A fluidic dispensing device, comprising:
- a fluid reservoir for carrying a fluid that contains an acidic component that is reactive with silicon;
- and
- a microfluidic ejection head having a nozzle plate and a microfluidic ejection chip connected to the nozzle plate, wherein the microfluidic ejection chip includes a silicon substrate having a fluid passageway that is in fluid communication with each of the fluid reservoir and the nozzle plate, the fluid passageway being defined by a silicon sidewall of the silicon substrate that is covered by a permanent passivation layer.
A method of generating a microfluidic ejection chip, comprising:
- creating an opening in a silicon substrate through multiple iterations of a deep reactive ion etching process;
- forming a passivation layer over any exposed portion of silicon at the opening following each iteration of the deep reactive ion etching of the silicon substrate;
- and
- not removing the passivation layer at a conclusion of the etching of the silicon substrate to define a fluid passageway at the opening in the silicon substrate, such that the passivation layer is permanent on the silicon substrate at the opening.
Dependencies are inferred from the claim text.