Brush, method of forming a brush, and structure embodied in a machine readable medium used in a design process
AssigneeApplied Materials, Inc.
InventorRajeev BAJAJ
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Abstract
Embodiments described herein generally relate to a brush, a method of forming a brush, and a structure embodied in a machine readable medium used in a design process are provided. The brush includes a body and a channel configured to deliver a cleaning liquid through holes in the body. The method forms the brush using 3D printing. The structure provides details for making the brush. The disclosure herein allows a method of forming a brush that does not require the removal of active porogen.
Claims20
A brush, comprising:
- a body comprising a first polymer material comprising a plurality of body holes, the plurality of body holes having a first body region, wherein a first body porosity of the first body region is greater than about 70%;
- and
- a channel disposed in the body, the channel fluidly coupled to the plurality of body holes.
A structure embodied in a machine readable medium used in a design process, the structure comprising:
- a brush, comprising:
- a body comprising a first polymer material comprising a plurality of body holes, the plurality of body holes having a first body region, wherein a first body porosity of the first body region is greater than about 70%;
- and
- a channel disposed in the body, the channel fluidly coupled to the plurality of body holes.
A method of forming a brush, comprising:
- forming a body of the brush using a three-dimensional (3D) printing process, the body comprising a first solid material comprising a plurality of body holes, the plurality of body holes having a first body region, wherein a first body porosity of the first body region is greater than about 70%;
- and
- forming a channel in the body of the brush using a 3D printing process, the channel fluidly coupled to the body plurality of holes.
Dependencies are inferred from the claim text.