Silicon-based substrate, substrate, manufacturing method thereof, and optoelectronic device

Abstract

This application relates to the electronic technology application field and provides a silicon-based substrate (10), a substrate, a manufacturing method thereof, and an optoelectronic device. The substrate includes: the silicon-based substrate (10), where one surface of the silicon-based substrate (10) has periodic protrusion structures (101), and there is an angle of inclination between a side face of each protrusion structure (101) and a bottom surface; and a group III-V material layer (20) disposed on the surface that is of the silicon-based substrate (10) and that has the protrusion structures (101).

Dependencies are inferred from the claim text.