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US 2021/0265483 A1Published application
Semiconductor device and method of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPei-Hsun Wang, Shih-Cheng Chen, Kuo-Cheng Chiang, Chih-Hao Wang
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Abstract
A semiconductor device includes a semiconductor substrate having a fin structure, a gate stack across the fin structure, a spacer structure on a sidewall of the gate stack, an epitaxial structure on the semiconductor substrate, and a dielectric structure in the spacer structure. The dielectric structure extends along a lower portion of the spacer structure and across the fin structure.
Claims20
A semiconductor device, comprising:
- a semiconductor substrate having a fin structure;
- a gate stack across the fin structure;
- a spacer structure on a sidewall of the gate stack;
- an epitaxial structure on the semiconductor substrate;
- and
- a dielectric structure in the spacer structure and extending along a lower portion of the spacer structure and across the fin structure.
3 more elements
A semiconductor device, comprising:
- a semiconductor substrate having a fin structure;
- a gate stack over the fin structure;
- a spacer structure over the fin structure and on a sidewall of the gate stack, and having a recessed face with a curved shape at a position proximal to the fin structure;
- and
- a dielectric structure in the spacer structure and having an inner face conformal to the recessed face of the spacer structure.
2 more elements
A method, comprising:
- forming a gate stack over a fin structure of a semiconductor substrate;
- forming a spacer structure on a sidewall of the gate stack;
- removing a portion of the spacer structure to form a recessed face on the spacer structure, such that the spacer structure has a trench defined by the recessed face;
- depositing a dielectric layer on the gate stack and the spacer structure;
- and
- removing a portion of the dielectric layer outside the trench of the spacer structure to form a dielectric structure.
3 more elements
Dependencies are inferred from the claim text.