Bonding system and bonding method
AssigneesBondtech Co., Ltd., Tadatomo SUGA
InventorsAkira YAMAUCHI, Tadatomo SUGA
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AssigneesBondtech Co., Ltd., Tadatomo SUGA
InventorsAkira YAMAUCHI, Tadatomo SUGA
Estimating the term…
A chip bonding system including an activation treatment device including a frame holder and a particle beam source that irradiates a sheet, to which a chip held by the frame holder is stuck, with a particle beam, to thereby activate a bonding surface of the chip; and a bonding device that brings the chip, of which the bonding surface is activated by the activation treatment device, into contact with a substrate, to thereby bond the chip to the substrate. The frame holder supports a holding frame in a posture in which one side, to which the chip is stuck, in the sheet, of the holding frame that holds the sheet TE, which is formed of a resin, and to which the chip is stuck, is exposed to the particle beam source.
A bonding system for bonding a second article to a first article the bonding system comprising:
A bonding system that bonds a second article to a first article to be bonded, wherein
A bonding system that bonds a second article to a first article, the bonding system comprising:
A bonding method of bonding a second article a first article, the bonding method comprising:
A bonding method of bonding a second article a first article, wherein
A bonding method of bonding a second article to a first article, the bonding method comprising a bonding step in which the first article to be bonded is held in a posture in which a bonding surface of the first article to be bonded faces vertically downward, a sheet to which the second article to be bonded is stuck in a posture in which a bonding surface of the second article to be bonded faces vertically upward is placed vertically below the first article to be bonded, and the second article to be bonded is bonded to the first article to be bonded by moving a head in a direction of approaching the first article to be bonded in a state in which the head is allowed to abut on a side opposite to the second article to be bonded in the sheet.
Dependencies are inferred from the claim text.