Wafer alignment markers, systems, and related methods

An alignment system, comprising:

• a substrate support for supporting a wafer;
• a sensor movable over the wafer and configured to detect responses of alignment markers within the wafer;
• a magnetic source located and configured to apply a magnetic field to at least a portion of the wafer or drive a magnetization of the alignment markers within the wafer;
• and
• a controller operably coupled to the substrate support and sensor, the controller comprising:
• at least one processor;
• and
• at least one non-transitory computer-readable storage medium storing instructions thereon that, when executed by the at least one processor, cause the controller to:
• receive data related to detected responses of the alignment markers from the sensor;
• and
• responsive to the received data, determine locations of the alignment markers within the wafer.