Stochastic signal prediction in compact modeling

A non-transitory computer readable storage medium comprising instructions which when executed by a processor cause the processor to:

• define a continuous signal;
• define a threshold value;
• calibrate the continuous signal and the threshold value from measurements made on edges of one or more patterns on a mask and corresponding edges of the one or more patterns on a wafer;
• convolve the continuous signal with a kernel to form a corrected signal, the kernel calibrated using the measurements;
• and
• establish an edge at a point along the corrected signal in accordance with a difference between a value of the corrected signal at the point and the calibrated threshold value.

A system comprising:

• a memory storing instructions;
• and
• a processor, coupled with the memory and to execute the instructions, the instructions when executed causing the processor to:
• define a continuous signal;
• define a threshold value;
• calibrate the continuous signal and the threshold value from measurements made on edges of one or more patterns on a mask and corresponding edges of the one or more patterns on a wafer;
• convolve the continuous signal with a kernel to form a corrected signal, the kernel calibrated using the measurements;
• and
• establish an edge at a point along the corrected signal in accordance with a difference between a value of the corrected signal at the point and the calibrated threshold value.