Vuv polarizer, vuv polarization device, vuv polarization method and alignment method

A VUV polarizer polarizing VUV light not more than 200 nm in wavelength,

• comprising:
• a substrate transparent to the VUV light;
• and
• a grid on the substrate;
• wherein
• the grid is formed of a lot of linear parts in parallel and structured with no filler between the linear parts;
• and
• a material of each linear part is hafnium oxide, yttrium oxide, hafnium-oxide-based multinary compound where another element is substituted partially for hafnium in hafnium oxide, or an yttrium-oxide-based multinary compound where another element is substituted partially for yttrium in yttrium oxide.

A VUV polarization device

• comprising:
• a VUV polarizer;
• and
• an atmosphere controller to replace an atmosphere surrounding the VUV polarizer with an inert gas;
• wherein
• the VUV polarizer is capable of polarizing VUV light not more than 200 nm in wavelength, and has a substrate transparent to VUV light and a grid on the substrate;
• the grid is formed of a lot of linear parts in parallel and structured with no filler between the linear parts;
• and
• each linear part is formed with an oxide of a Group 3 element or Group 4 element and makes PE not less than 0.2 under an optical constant combination making PE maximum in the VUV range, where PE=T2×log10(ER), T is transmittance of the grid, and ER is extinction ratio of the grid.

A VUV polarization device

• comprising:
• a VUV polarizer;
• and
• an atmosphere controller for replacing an atmosphere surrounding the VUV polarizer with an inert gas;
• wherein
• the VUV polarizer is capable of polarizing VUV light not more than 200 nm in wavelength, and has a substrate transparent to VUV light and a grid on the substrate;
• the grid is formed of a lot of linear parts in parallel and structured with no filler between the linear parts;
• and
• a material of each linear part is hafnium oxide, yttrium oxide, hafnium-oxide-based multinary compound where another element is substituted partially for hafnium in hafnium oxide, or an yttrium-oxide-based multinary compound where another element is substituted partially for yttrium in yttrium oxide.

A VUV polarization method for polarizing non-polarized light not more than 200 nm in wavelength by irradiation onto a VUV polarizer,

• wherein
• the VUV polarizer is structured with a grid formed of a lot of linear parts in parallel on a substrate transparent to the VUV light;
• a material of each linear part is an oxide of a Group 3 element or Group 4 element and makes PE not less than 0.2 under an optical constant combination making PE maximum in the VUV range, where PE=T2×log10(ER), T is transmittance of the grid, and ER is extinction ratio of the grid;
• and
• the grid is structured with no filler between the linear parts.

A VUV polarization method for polarizing non-polarized VUV light not more than 200 nm in wavelength by irradiation onto a VUV polarizer,

• wherein
• the VUV polarizer is structured with a grid formed of a lot of linear parts in parallel on a substrate transparent to VUV light;
• a material of each linear part is hafnium oxide, yttrium oxide, hafnium-oxide-based multinary compound where another element is substituted partially for hafnium in hafnium oxide, or an yttrium-oxide-based multinary compound where another element is substituted partially for yttrium in yttrium oxide;
• and
• the grid is structured with no filler between the linear parts.

An alignment method for forming an alignment layer having a molecular structure oriented to a constant direction on a workpiece,

• comprising:
• obtaining polarized VUV light not more than 200 nm in wavelength by irradiation of non-polarized VUV light onto a VUV polarizer;
• and
• forming the alignment layer by irradiation of the polarized VUV light onto the workpiece;
• wherein
• the VUV polarizer has a structure where a grid formed of a lot of linear parts in parallel is provided on a substrate transparent to VUV light;
• a material of each linear part is an oxide of a Group 3 element or Group 4 element and has PE not less than 0.2 under an optical constant combination making PE maximum in the VUV range, where PE=T2×log10(ER), T is transmittance of the grid and ER is extinction ratio of the grid;
• and
• the grid is structured with no filler between the linear parts,
• further comprising:
• placing the workpiece at a position within 1 to 20 millimeters from the VUV polarizer during the irradiation of the polarized VUV light;
• and
• making the irradiation dose of the VUV light onto the workpiece not less than 40 mJ/cm2 and not more than 4000 mJ/cm2.

An alignment method for forming an alignment layer having a molecular structure oriented to a constant direction on a workpiece,

• comprising:
• obtaining polarized VUV light not more than 200 nm in wavelength by irradiation of non-polarized light onto a VUV polarizer;
• and
• forming the alignment layer by irradiation of the polarized VUV light onto the workpiece;
• wherein
• the VUV polarizer has a structure where a grid formed of a lot of linear parts in parallel is provided on a substrate transparent to VUV light;
• a material of each linear part is hafnium oxide, yttrium oxide, a hafnium-oxide-based multinary compound where another element is substituted partially for hafnium in hafnium oxide, or an yttrium-oxide-based multinary compound where another element is substituted partially for yttrium in yttrium oxide;
• and
• the grid is structured with no filler between the linear parts;
• further comprising:
• placing the workpiece at a position within 1 to 20 millimeters from the VUV polarizer during the irradiation of the polarized VUV light;
• and
• making the irradiation dose of the VUV light onto the workpiece not less than 40 mJ/cm2 and not more than 4000 mJ/cm2.