Top gate thin film transistor gas sensor

Abstract

A top gate thin film transistor gas sensor for detecting or measuring a concentration of a target gas. The gas sensor is configured so that the target gas can pass through the top gate and interact with a semiconducting layer of the gas sensor. The top gate may not cover a channel of the semiconducting layer disposed beneath the top gate so that the target gas may communicate with the channel without impedance by the top gate. The top gate may be patterned with channels through which the target gas may pass through the top gate to the channel in the semiconducting layer. The top gate may be permeable to the target gas allowing passage of the target gas to the channel. A substrate on which the semiconducting layer is formed may be permeable to the target gas allowing the target gas to communicate with the channel.

Dependencies are inferred from the claim text.