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US 2021/0262967 A1Published application
Micro-hotplate and mems gas sensor
AssigneesOMRON Corporation, Figaro Engineering Inc.
InventorsYoshitaka TATARA, Masahito HONDA, Hiroaki NAGAI, Yoshiki ASHIHARA, Kuniyuki IZAWA, Masakazu SAI, Kenichi YOSHIOKA
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Abstract
A micro-hotplate comprises a Si substrate having a cavity and a support layer over the cavity; at least an electrode; and a heater, both provided on the support layer. The electrode surrounds the heater and the heater is disposed inside the electrode. The power efficiency of the micro-hotplate is improved.
Claims5
1-8. (canceled)
A MEMS gas sensor comprising:
- a Si substrate having a cavity and a support layer over the cavity;
- two electrodes facing each other;
- one heater;
- two heater leads connected to both ends of said heater;
- and a gas sensitive layer, all on the support layer,
- wherein said two electrodes have a dual ring-like shape having a common opening and surround said heater,
- wherein said heater is disposed and folds back at plural times inside said two electrodes and forms a disclike or annular heat generating region,
- wherein said two heater leads are drawn out through said common opening, and
- wherein said gas sensitive layer covers said two electrodes.
6 more elements
Dependencies are inferred from the claim text.