Processing apparatus

A processing apparatus for processing a workpiece full-automatically, the processing apparatus comprising:

• a holding table that holds the workpiece;
• a processing unit that processes the workpiece by use of a processing tool;
• a cassette stage on which to place a shelf-type cassette for accommodating a plurality of workpieces;
• a robot that takes out the workpiece from the cassette or accommodates the workpiece into the cassette;
• a temporary placing unit for temporarily placing the workpiece taken out of the cassette;
• a carrying-in mechanism that carries the workpiece temporarily placed on the temporary placing unit onto the holding table;
• a cleaning unit that cleans the workpiece;
• a carrying-out mechanism that carries the workpiece held by the holding table to the cleaning unit;
• a selection section that selects two or more components from a plurality of components including the holding table, the processing unit, the robot, the temporary placing unit, the carrying-in mechanism, the cleaning unit, and the carrying-out mechanism;
• and
• a control unit that handles the workpiece at part of routes that correspond to the components selected by the selection section, of the routes for passage of the workpiece at a time of processing the workpiece full-automatically by use of the plurality of components.