Cleaning method and cleaning apparatus
AssigneeEbara Corporation
InventorKiyoshi Suzuki
Life of this patent
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Abstract
There is provided a cleaning method and a cleaning apparatus capable of removing dirt on electrical contacts, the dirt being unable to be removed with deionized water, without adversely affecting a plating solution and a substrate holder which is a member for holding a substrate. A cleaning method according to the present disclosure is a cleaning method for a substrate holder having electrical contacts for supplying electric power to a substrate by contacting the substrate to plate the substrate, the method including a cleaning step of cleaning the electrical contacts attached to the substrate holder with a citric acid aqueous solution.
Claims20
A cleaning method for a substrate holder having electrical contacts for supplying electric power to a substrate 1w contacting the substrate to plate the substrate, the method comprising:
- a cleaning step of cleaning the electrical contacts of the substrate holder with a citric acid aqueous solution.
A cleaning apparatus, comprising:
- a rotation member for holding a ring-shaped holding member that holds a substrate for plating and has electrical contacts brought into contact with the substrate;
- an actuator for rotating the rotation member to rotate the holding member in a circumferential direction;
- and
- a cleaning module for cleaning, with a citric acid aqueous solution, the holding member rotated by the rotation member.
A cleaning apparatus for a holding member that has electrical contacts and is a member forming at least part of a substrate holder, the cleaning apparatus comprising:
- a cleaning tank for holding a citric acid aqueous solution therein and immersing the holding member in the citric acid aqueous solution.
Dependencies are inferred from the claim text.