Ligand-modified filter and methods for reducing metals from liquid compositions
AssigneeEntegris, Inc.
InventorsJames HAMZIK, Jad A. JABER, Nicholas J. FILIPANCIC, Justin BREWSTER
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Abstract
Described are filter materials having polycarboxyl ligands, such as iminodiacetic acid, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter various fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.
Claims20
A filter material comprising a polycarboxyl ligand, wherein the filter material is configured to be used in conjunction with a microelectronic fabrication system for providing a metal- or metal ion-depleted liquid composition and wherein the polycarboxyl ligands are covalently bound to the filter material through at least one linkage which is other than through a carboxyl group.
A composite membrane comprising:
- a first filter material and a second filter material, wherein an output facing surface of the first filter material is in contact with an input facing surface of the second filter material, the first filter material or the second filter material comprising polycarboxyl ligands covalently bound to the filter through at least one linkage which is other than through a carboxyl group;
- wherein the second filter material is different from the first filter material, and wherein the composite membrane is configured to be used in conjunction with a microelectronic fabrication system for providing a metal- or metal ion-depleted liquid composition.
A filter material comprising a porous polymeric filter material comprising ultra-high molecular weight polyethylene, having coated thereon a composition comprising a free-radical reaction product of (i) a polycarboxyl compound having an olefinic group and (ii) at least one monomeric, oligomeric, or polymeric compound having olefinic unsaturation.
A method of removing one or more metals or metal ions from a liquid composition, the method comprising:
- contacting a filter material with a liquid composition comprising one or more metals or metal ions, the filter material comprising polycarboxyl ligands covalently bound to the filter material through at least one linkage which is other than through a carboxyl group, and
- reducing an amount of the one or more metal or metal ions in the liquid composition.
Dependencies are inferred from the claim text.