Ceramic heater
AssigneeNGK Insulators, Ltd.
InventorsMasaki ISHIKAWA, Shuichiro MOTOYAMA
Life of this patent
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Abstract
A ceramic heater includes a ceramic plate, a main resistance heating element, and sub resistance heating elements. The main resistance heating element is a heating element that is disposed on a first plane parallel with a wafer placement surface in the ceramic plate and that has a coil shape. The sub resistance heating elements are heating elements that are disposed on a second plane parallel with the first plane in the ceramic plate between the first plane and the wafer placement surface, that complement heating with the main resistance heating element, and that have a two-dimensional shape.
Claims7
A ceramic heater comprising:
- a ceramic plate that has a wafer placement surface;
- a main resistance heating element that is disposed on a first plane parallel with the wafer placement surface in the ceramic plate and that has a coil shape;
- and
- a sub resistance heating element that is disposed on a second plane parallel with the first plane in the ceramic plate, that complements heating with the main resistance heating element, and that has a two-dimensional shape.
Dependencies are inferred from the claim text.