Ceramic heater

A ceramic heater comprising:

• a disk-shaped ceramic plate having a wafer placement surface;
• an outer peripheral resistance heating element incorporated in the ceramic plate and having a shape that extends out from one of a pair of terminals provided at a center portion of the ceramic plate to an annular outer peripheral zone of the ceramic plate and reaches another of the pair of terminals after disposed in the outer peripheral zone while turning back at a plurality of turn-back portions;
• and
• an outer peripheral thermocouple that measures a temperature of the outer peripheral zone by a temperature measurement portion provided at a tip of the outer peripheral thermocouple,
• wherein, when the ceramic plate is viewed from the wafer placement surface, the temperature measurement portion is disposed at a location in the outer peripheral zone excluding a part where the turn-back portions of the outer peripheral resistance heating element face each other.