Ceramic heater and thermocouple guide

A ceramic heater comprising:

• a ceramic plate having a disk shape and having a wafer placement surface;
• a tubular shaft having one end that is bonded to a rear surface of the ceramic plate on an opposite side to the wafer placement surface;
• an inner-peripheral-side resistance heating element that is embedded in an inner peripheral portion of the ceramic plate;
• an outer-peripheral-side resistance heating element that is embedded in an outer peripheral portion of the ceramic plate;
• a within-shaft region of the rear surface of the ceramic plate, the within-shaft region locating within the tubular shaft;
• an elongate hole that extends from a start point in an outer peripheral portion of the within-shaft region to a predetermined terminal end position in the outer peripheral portion of the ceramic plate;
• associated parts that are disposed in the within-shaft region and that include a pair of terminals of the inner-peripheral-side resistance heating element and a pair of terminals of the outer-peripheral-side resistance heating element;
• and
• a thermocouple that is arranged to extend from the other end of the tubular shaft, to pass through the elongate hole, and to reach the terminal end position,
• wherein a portion of the thermocouple, the portion extending from the other end of the tubular shaft to the start point of the elongate hole, is formed in a shape following an inner wall of the tubular shaft.