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US 2021/0243846 A1Published application
Ceramic heater
AssigneeNgk Insulators, Ltd.
InventorsNoboru KAJIHARA, Shuichiro MOTOYAMA
Life of this patent
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Abstract
A ceramic heater includes a ceramic plate having a surface that serves as a wafer placement surface, resistance heating elements that are embedded in the ceramic plate, a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate, a recess that is formed in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft, and terminals that are disposed to be exposed at a side surface of the recess and that supply electric power to the resistance heating element.
Claims7
A ceramic heater comprising:
- a ceramic plate having a surface that serves as a wafer placement surface;
- a resistance heating element that is embedded in the ceramic plate;
- a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate;
- a recess that is formed in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft;
- and
- terminals that are disposed to be exposed at a side surface of the recess and that supply electric power to the resistance heating element.
3 more elements
Dependencies are inferred from the claim text.