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US 2021/0243845 A1Published application
Substrate fixing device
AssigneeShinko Electric Industries Co., Ltd.
InventorsAkihiro Kuribayashi, Riku Nishikawa
Life of this patent
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Abstract
A substrate fixing device includes: an electrostatic chuck that is configured to adsorb and retain an object thereon, and including a base body on which the object is mounted, and an electrostatic electrode that is provided in the base body; and a base plate on which the electrostatic chuck is mounted, and having a plurality of through holes each exposing a first face of the base body facing the base plate. Laser light is emitted from each of the through holes toward the base body.
Claims8
A substrate fixing device comprising:
- an electrostatic chuck that is configured to adsorb and retain an object thereon, and comprising a base body on which the object is mounted, and an electrostatic electrode that is provided in the base body;
- and
- a base plate on which the electrostatic chuck is mounted, and having a plurality of through holes each exposing a first face of the base body facing the base plate,
- wherein laser light is emitted from each of the through holes toward the base body.
1 more element
Dependencies are inferred from the claim text.