Multifunctional logic device and method

A logic system comprising:

• a substrate extending in a plane;
• a microelectromechanical system, MEMS, resonator having a first side beam, an arch beam, and a second side beam connected in series to each other and attached at only two ends to the substrate;
• an input electrode facing the second side beam;
• a selector electrode facing the second side beam;
• a first output electrode facing the first side beam;
• and
• a second output electrode facing the arch beam,
• wherein the entire arch beam and parts of the first and second side beams are free to move substantially perpendicular to the substrate.

A method for generating low and high states with a logic system, the method comprising:

• applying a first voltage to a microelectromechanical system, MEMS, resonator having an arch beam and first and second side beams, wherein the first side beam is attached with a first end to a first end of the arch beam and the second side beam is attached with a first end to a second end of the arch beam to form a U-shape;
• applying a second voltage to an input electrode facing the second side beam and a selector electrode facing the second side beam to tune a first resonant frequency of a first mode to a first operating frequency to generate a first output (OUT1) at a first output electrode facing the first side beam;
• and
• applying the second voltage only to the input electrode and a zero voltage to the selector electrode to tune a second resonant frequency of a second mode to a second operating frequency to generate a second output (OUT2), at a second output electrode facing the arch beam.